Recent Developments in Microsystem- and Nanodevice-TCAD

In this context, the author discussed the most important aspects and practical methodologies for setting up physically-based and consistent nanostructure, microdevice, and full system models for the effort-economizing and yet accurate numerical simulation of mechatronical microsensors and microactuators and complete microsystems built up of them. In this modeling framework, the author demonstrates the consistent treatment of coupled fields and coupled energy and signal domains (briefly, even though not very precisely termed "multi-physics modeling"), which is required for deriving micromechatronical macromodels on the system level from the continuous field level (so-called "order reduction process"), and we also address some important issues to be focussed on for the reliable validation and accurate calibration of the models