Electromagnetically driven ulutra-miniature single fiber scanner for high-resolution endoscopy fabricated on cylindrical substrates using mems process

An electromagnetically driven single fiber scanner for high-resolution visual inspection in narrow spaces of the human body was developed. This scanner consists of a single fiber and driving coils. The driving coils are photofabricated on the 1.08-mm outer diameter of a thin polymer tube, and a cylindrical permanent magnet is fixed on the fiber. The fiber is positioned at the center of the tube on which the driving coils are photofabricated. When an alternating current at the resonance frequency is supplied to the coils, the permanent magnet which is fixed to the fiber is scanned electromagnetically and two-dimensionally. In this study, spiral scanning and OCT imaging were demonstrated.