• DocumentCode
    2010050
  • Title

    Dependence of Thin Oxide Films Quality on Surface Micro-Roughness

  • Author

    Miyashita, M. ; Itano, M. ; Imaoka, T. ; Kawanabe, I. ; Ohmi, T.

  • Author_Institution
    Department of Electronics, Tohoku University, Japan
  • fYear
    1991
  • fDate
    28-30 May 1991
  • Firstpage
    45
  • Lastpage
    46
  • Keywords
    Dielectric breakdown; Electric breakdown; Electric variables measurement; Electrodes; Rough surfaces; Silicon; Surface cleaning; Surface contamination; Surface roughness; Surface treatment;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    VLSI Technology, 1991. Digest of Technical Papers., 1991 Symposium on
  • Conference_Location
    Oiso, Japan
  • Type

    conf

  • DOI
    10.1109/VLSIT.1991.705982
  • Filename
    705982
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2010050