Micro- and nano-link ultra-low power heaters for sensors

Author

Groenland, A.W. ; Vereshchagina, E. ; Kovalgin, A.Y. ; Wolters, R.A.M. ; Gardeniers, J.G.E. ; Schmitz, J.

Author_Institution

MESA+ Inst. for Nanotechnol., Univ. of Twente, Enschede, Netherlands

fYear

2012

fDate

17-21 Sept. 2012

Firstpage

169

Lastpage

172

Abstract

A new microfabricated device for heating and sensing in gases is presented. It is based on the resistive heating of a micro- or nano-metric hollow cylinder of titanium nitride, and measurement of its (temperature-dependent) resistance. This article presents the fabrication and temperature calibration of the device, and illustrates its function as flow meter and thermal conductivity meter. A temperature of 280 °C is achieved at a power consumption of only 5.5 μW, orders of magnitude less than existing commercial hotplate devices. The thermal time constant can be as low as 60-120 microseconds.

Keywords

low-power electronics; microfabrication; microsensors; power consumption; resistance heating; temperature; thermal conductivity; thermal resistance; titanium compounds; flow meter; gas heating; gas sensing; hotplate device; microfabricated device; microlink ultra-low power heater; micrometric hollow cylinder; nanolink ultra-low power heater; nanometric hollow cylinder; power 5.5 muW; power consumption; resistive heating; sensor; temperature 280 C; temperature calibration; temperature-dependent resistance; thermal conductivity meter; thermal time constant; titanium nitride; Electrodes; Heating; Resistance; Temperature measurement; Temperature sensors; Tin;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Device Research Conference (ESSDERC), 2012 Proceedings of the European

Conference_Location

Bordeaux

ISSN

1930-8876

Print_ISBN

978-1-4673-1707-8

Electronic_ISBN

1930-8876

Type

conf

DOI

10.1109/ESSDERC.2012.6343360

Filename

6343360