DocumentCode
2013207
Title
Beam energy enhancement studies in a plasma sputter-type negative ion source
Author
Yarnbot, M.L. ; Ubarro, A.O. ; Ramos, H.J.
fYear
2003
fDate
5-5 June 2003
Firstpage
211
Abstract
Summary form only given, as follows. A one-liter volume plasma sputter-type negative ion source is used for the production of metal ions like Zr/sup -/ and ions like O/sup -/ and H/sup -/ depending on the target material and gas. The energies of these ions have been obtained in the range of a few hundred eV using a retarding potential-type electrostatic energy analyzer. In this work, the range of energies is enhanced to the keV range by proper focusing and acceleration schemes of the self-extracted ions. Ion beam characterization include measurements of beam energy, ion current density, perveance and emittance. The results for cesiated and uncesiated targets are discussed.
Keywords
ion sources; Cs; H; O; Zr; beam energy; cesiated targets; emittance; ion current density; perveance; plasma sputter-type negative ion source; uncesiated targets; Acceleration; Electrostatic analysis; Inorganic materials; Ion beams; Ion sources; Particle beams; Plasma materials processing; Plasma sources; Production; Zirconium;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location
Jeju, South Korea
ISSN
0730-9244
Print_ISBN
0-7803-7911-X
Type
conf
DOI
10.1109/PLASMA.2003.1228697
Filename
1228697
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