• DocumentCode
    2013207
  • Title

    Beam energy enhancement studies in a plasma sputter-type negative ion source

  • Author

    Yarnbot, M.L. ; Ubarro, A.O. ; Ramos, H.J.

  • fYear
    2003
  • fDate
    5-5 June 2003
  • Firstpage
    211
  • Abstract
    Summary form only given, as follows. A one-liter volume plasma sputter-type negative ion source is used for the production of metal ions like Zr/sup -/ and ions like O/sup -/ and H/sup -/ depending on the target material and gas. The energies of these ions have been obtained in the range of a few hundred eV using a retarding potential-type electrostatic energy analyzer. In this work, the range of energies is enhanced to the keV range by proper focusing and acceleration schemes of the self-extracted ions. Ion beam characterization include measurements of beam energy, ion current density, perveance and emittance. The results for cesiated and uncesiated targets are discussed.
  • Keywords
    ion sources; Cs; H; O; Zr; beam energy; cesiated targets; emittance; ion current density; perveance; plasma sputter-type negative ion source; uncesiated targets; Acceleration; Electrostatic analysis; Inorganic materials; Ion beams; Ion sources; Particle beams; Plasma materials processing; Plasma sources; Production; Zirconium;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
  • Conference_Location
    Jeju, South Korea
  • ISSN
    0730-9244
  • Print_ISBN
    0-7803-7911-X
  • Type

    conf

  • DOI
    10.1109/PLASMA.2003.1228697
  • Filename
    1228697