DocumentCode
2014244
Title
Mode analysis and self ducting of high power microwaves in preformed density channels
Author
Rajyaguru, C. ; Ito, H. ; Yugami, Noboru ; Nishida, Yoshiharu
Author_Institution
Graduate Sch. of Eng., Utsunomiya Univ., Japan
fYear
2003
fDate
5-5 June 2003
Firstpage
235
Abstract
Summary form only given, as follows. Planar surface wave plasma (SWP) has been expected to be one of the next generation plasma sources for the processing and extensively studied. The questions why the efficiency of the energy absorption in SWP is so good and as the results high density plasma is sustained, are still not clear.
Keywords
plasma instability; plasma radiofrequency heating; plasma sources; plasma waves; energy absorption; high density plasma; high power microwaves; mode analysis; next generation plasma sources; planar surface wave plasma; preformed density channels; self ducting; Dielectrics; Glass; Indium tin oxide; Microwave propagation; Plasma density; Power engineering and energy; Refractive index; Strips; Surface waves; Waveguide theory;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2003. ICOPS 2003. IEEE Conference Record - Abstracts. The 30th International Conference on
Conference_Location
Jeju, South Korea
ISSN
0730-9244
Print_ISBN
0-7803-7911-X
Type
conf
DOI
10.1109/PLASMA.2003.1228744
Filename
1228744
Link To Document