• DocumentCode
    2014484
  • Title

    FEM simulation of piezoresistive pressure module

  • Author

    Gridchin, Victor A. ; Chebanov, Michail A.

  • Author_Institution
    Dept. of Semicond. Devices & Microelectron., Novosibirsk State Tech. Univ., Novosibirsk, Russia
  • fYear
    2010
  • fDate
    June 30 2010-July 4 2010
  • Firstpage
    121
  • Lastpage
    123
  • Abstract
    The impact of singularity points on stress distribution in piezoresistive module is investigated by means of FEM simulation. The strong influence of singularities on stress distribution in silicon-glass interface is presented in this paper.
  • Keywords
    finite element analysis; piezoresistive devices; silicon; FEM simulation; Si-SiO2; piezoresistive pressure module; silicon-glass interface; stress distribution; Computational modeling; Face; Finite element methods; Glass; Seminars; Silicon; FEM simulation; pressure sensor; singular points;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro/Nanotechnologies and Electron Devices (EDM), 2010 International Conference and Seminar on
  • Conference_Location
    Novosibirsk
  • Print_ISBN
    978-1-4244-6626-9
  • Type

    conf

  • DOI
    10.1109/EDM.2010.5568641
  • Filename
    5568641
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2014484