• DocumentCode
    2015716
  • Title

    New Functions Elaborated in Oxide Glasses by Nanotechnology

  • Author

    Nishii, Junji ; Hirao, Kazuyuki

  • Author_Institution
    National Institute of Advance Industrial Science and Technology
  • fYear
    2004
  • fDate
    25-27 Aug. 2004
  • Firstpage
    356
  • Lastpage
    358
  • Abstract
    Recent three topics of Nanotechnology Glass Project were described. (1) A proton-conducting hybrid material was fabricated using a glass plate with nano-pores. The conductivity of the hybrid glass plate was comparable to Nafion, and no corrosion or degradation observed up to 120°C. (2) Nano-particles of CdTe were synthesized in a water solution and embedded in the glass matrix using a sol-gel method. The emission quantum efficiency pf 3% was attained. (3) Deep dry etching followed by overcladding buried the DOE with a deep groove inside a Si0₂ plate, which was used for fabrication of an ultra small demultiplexer.
  • Keywords
    Glass; Micromechanical devices; Nanotechnology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
  • Print_ISBN
    0-7695-2189-4
  • Type

    conf

  • DOI
    10.1109/ICMENS.2004.1508975
  • Filename
    1508975