• DocumentCode
    2016455
  • Title

    The role of copper in electromigration: the effect of a Cu-vacancy binding energy

  • Author

    Tammaro, M.

  • Author_Institution
    Dept. of Phys., Rhode Island Univ., Kingston, RI, USA
  • fYear
    2000
  • fDate
    2000
  • Firstpage
    317
  • Lastpage
    323
  • Abstract
    The effect of a Cu-vacancy binding energy on electromigration transport in Al-Cu alloys is studied in detail. A lattice-gas model for electromigration is developed which accounts for the Cu-vacancy binding energy. Expressions for the diffusion coefficients are derived in the limit of low vacancy concentrations and calculated using Monte Carlo simulations. The diffusion equations are solved for the failure times and concentration profiles. Our results show that for a binding energy of about 0.2 eV there is a dramatic increase in the failure time for copper doping levels of only 1%. The concentration profiles are consistent with `incubation time´ phenomena in experiments where the copper is found to drift away from the blocking boundary before failure occurs
  • Keywords
    Monte Carlo methods; aluminium alloys; copper alloys; electromigration; integrated circuit interconnections; vacancies (crystal); Al-Cu; Cu-vacancy binding energy; Monte Carlo simulations; blocking boundary; concentration profiles; diffusion coefficients; diffusion equations; electromigration; failure times; incubation time; lattice-gas model; vacancy concentration; Aluminum; Copper; Doping; Electromigration; Equations; Grain boundaries; Lattices; Microelectronics; Microscopy; Physics;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Reliability Physics Symposium, 2000. Proceedings. 38th Annual 2000 IEEE International
  • Conference_Location
    San Jose, CA
  • Print_ISBN
    0-7803-5860-0
  • Type

    conf

  • DOI
    10.1109/RELPHY.2000.843933
  • Filename
    843933