DocumentCode
2016455
Title
The role of copper in electromigration: the effect of a Cu-vacancy binding energy
Author
Tammaro, M.
Author_Institution
Dept. of Phys., Rhode Island Univ., Kingston, RI, USA
fYear
2000
fDate
2000
Firstpage
317
Lastpage
323
Abstract
The effect of a Cu-vacancy binding energy on electromigration transport in Al-Cu alloys is studied in detail. A lattice-gas model for electromigration is developed which accounts for the Cu-vacancy binding energy. Expressions for the diffusion coefficients are derived in the limit of low vacancy concentrations and calculated using Monte Carlo simulations. The diffusion equations are solved for the failure times and concentration profiles. Our results show that for a binding energy of about 0.2 eV there is a dramatic increase in the failure time for copper doping levels of only 1%. The concentration profiles are consistent with `incubation time´ phenomena in experiments where the copper is found to drift away from the blocking boundary before failure occurs
Keywords
Monte Carlo methods; aluminium alloys; copper alloys; electromigration; integrated circuit interconnections; vacancies (crystal); Al-Cu; Cu-vacancy binding energy; Monte Carlo simulations; blocking boundary; concentration profiles; diffusion coefficients; diffusion equations; electromigration; failure times; incubation time; lattice-gas model; vacancy concentration; Aluminum; Copper; Doping; Electromigration; Equations; Grain boundaries; Lattices; Microelectronics; Microscopy; Physics;
fLanguage
English
Publisher
ieee
Conference_Titel
Reliability Physics Symposium, 2000. Proceedings. 38th Annual 2000 IEEE International
Conference_Location
San Jose, CA
Print_ISBN
0-7803-5860-0
Type
conf
DOI
10.1109/RELPHY.2000.843933
Filename
843933
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