DocumentCode
2016672
Title
Equilibrium and Stability of Micro-Cantilevers Used in Atomic Force Microscopy
Author
Zu, Jean W. ; Cheng, Gong ; Tang, Qian
Author_Institution
University of Toronto
fYear
2004
fDate
25-27 Aug. 2004
Firstpage
537
Lastpage
540
Abstract
The equilibrium states and their stability of micro-cantilevers used in the AFM under the noncontact and contact mode operations are studied with the energy method. The focus of the study is laid on the influence of the length of the micro-cantilever as well as its working distance from the sample surface upon the system’s equilibrium state. The findings from this study can provide useful guidance to the design of micro-cantilevers in the AFM.
Keywords
Atomic force microscopy; Atomic measurements; Educational institutions; Electron microscopy; Equations; Focusing; Force measurement; Industrial engineering; Potential energy; Stability analysis;
fLanguage
English
Publisher
ieee
Conference_Titel
MEMS, NANO and Smart Systems, 2004. ICMENS 2004. Proceedings. 2004 International Conference on
Print_ISBN
0-7695-2189-4
Type
conf
DOI
10.1109/ICMENS.2004.1509007
Filename
1509007
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