Improvement of ozone yield by multi-discharge ozonizer using superposition of silent discharge plasma

Summary form only given, as follows. The efficiency of ozonizer using silent discharge plasma is very low compare with the theoretical value. Therefore, many researches have been carried out in order to improve the efficiency of ozonizers. But we cannot expect to improve the efficiency without changing the process of ozone generation. To improve the ozone yield, a new type of multi-discharge ozonizer is proposed that it can be consisted with three kinds of superposed silent discharge type ozonizer in accordance with applying method of power source which has 180 degree phase difference. A superposed discharge type ozonizer is equipped with three electrodes (the central, internal and external electrodes), and it is composed of two discharge spaces( discharge space between central electrode and internal electrode, discharge space between internal electrode and external electrode). Ozone is generated by overlapping of each superposed discharge type ozonizer, which silent discharge plasma come from two discharge spaces respectively.