A unified model for on-chip CPWs with various types of ground shields

Author

Wang, Hongrui ; Zeng, Dajie ; Yang, Dongxu ; Zhang, Li ; Zhang, Lei ; Wang, Yan ; Qian, He ; Yu, Zhiping

Author_Institution

Inst. of Microelectron., Tsinghua Univ., Beijing, China

fYear

2011

fDate

5-7 June 2011

Firstpage

1

Lastpage

4

Abstract

Coplanar waveguides (CPW) are promising candidates for high quality passive devices in millimeter-wave frequency bands. In this paper, CPW transmission lines with and without ground shields have been designed and fabricated on 65nm CMOS technology. A physical-based model is proposed to describe the frequency-dependent per-unit-length L, C, R, and G parameters. Started from a standard CPW structure, influences of different kinds of ground shields have been analyzed and included into the general model. The accuracy of the model is confirmed by experimental results.

Keywords

CMOS integrated circuits; coplanar waveguides; electromagnetic shielding; slow wave structures; CMOS technology; coplanar waveguides; ground shields; millimeter-wave frequency bands; on-chip CPW; Capacitance; Conductors; Coplanar waveguides; Inductance; Integrated circuit modeling; Metals; Substrates; CMOS; Coplanar waveguides (CPW); Ground shield; slow wave;

fLanguage

English

Publisher

ieee

Conference_Titel

Radio Frequency Integrated Circuits Symposium (RFIC), 2011 IEEE

Conference_Location

Baltimore, MD

ISSN

1529-2517

Print_ISBN

978-1-4244-8293-1

Electronic_ISBN

1529-2517

Type

conf

DOI

10.1109/RFIC.2011.5940663

Filename

5940663