DocumentCode
2018387
Title
Miniature microwave RF MEMS tunable waveguide filter
Author
Scarbrough, Derek ; Goldsmith, Charles ; Papapolymerou, John ; Li, Yuan
Author_Institution
MEMtronics Corp., Plano, TX, USA
fYear
2009
fDate
Sept. 29 2009-Oct. 1 2009
Firstpage
1860
Lastpage
1863
Abstract
This paper presents an RF MEMS tunable filter implemented in waveguide. A compact waveguide topology was chosen to make use of high-Q cavity resonators for the creation of a low-loss, two-pole filter. The filter results in an insertion loss of 4.7-5.8 dB over the tuning range 10.12-10.33 GHz with a relative bandwidth of 0.42-0.67%. This design demonstrates an unloaded quality factor of 169-319 over the tunable frequency range with the potential to exceed 500.
Keywords
Q-factor; cavity resonator filters; micromechanical devices; microwave filters; waveguide filters; compact waveguide topology; frequency 10.12 GHz to 10.33 GHz; high-Q cavity resonators; insertion loss; loss 4.7 dB to 5.8 dB; low-loss filter; miniature microwave RF MEMS tunable waveguide filter; two-pole filter; unloaded quality factor; Bandwidth; Cavity resonators; Frequency; Insertion loss; Microwave filters; Q factor; Radiofrequency microelectromechanical systems; Resonator filters; Topology; Tuning;
fLanguage
English
Publisher
ieee
Conference_Titel
Microwave Conference, 2009. EuMC 2009. European
Conference_Location
Rome
Print_ISBN
978-1-4244-4748-0
Type
conf
Filename
5296169
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