DocumentCode
2019577
Title
Vertical comb array microactuators
Author
Selvakumar, A. ; Najafi, K. ; Juan, W.H. ; Pang, S.
fYear
1995
fDate
29 Jan-2 Feb 1995
Firstpage
43
Keywords
Actuators; Bridge circuits; Capacitors; Electrodes; Electrostatics; Etching; Fabrication; Microactuators; Micromachining; Microstructure;
fLanguage
English
Publisher
ieee
Conference_Titel
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN
0-7803-2503-6
Type
conf
DOI
10.1109/MEMSYS.1995.472556
Filename
472556
Link To Document