Analysis of measurement accuracy of air flow sensor influenced by moisture

Author

Chunlin Xu ; Quan Zhou ; Xing Guo ; Shannan Zhan ; Bo Xiong ; Hao Jiang ; Sheng Liu

Author_Institution

Inst. of Microsyst., Huazhong Univ. of Sci. & Technol., Wuhan, China

fYear

2015

fDate

11-14 Aug. 2015

Firstpage

694

Lastpage

698

Abstract

The paper presents an analysis of moisture on the output of hot film air flow sensor. The model used for analyzing the influence of moisture on the sensor is set up with the whole sensor structure into consideration. CFD and gas-solid coupled heat transfer model is used for simulation. The thermal physical property of air with moisture is discussed in the paper. The temperature distribution of hot film air flow sensor with respect to the air flow rate and relative humidity of air is computed for analysis. By comparing the results with the dry air situation, the conclusion is made. The moisture in the air will lower the temperature of the upstream and downstream resistance and increases the temperature difference between the two resistances and the power consumption of the sensor.

Keywords

computational fluid dynamics; flow sensors; heat transfer; humidity; measurement uncertainty; moisture; power consumption; CFD; gas-solid coupled heat transfer model; hot film air flow sensor; measurement accuracy; moisture; power consumption; relative humidity; temperature distribution; thermal physical property; Films; Fluid flow measurement; Heating; Moisture; Resistance; Temperature measurement; Temperature sensors; ANSYS Fluent; flow rate; hot film air flow sensor; moisture;

fLanguage

English

Publisher

ieee

Conference_Titel

Electronic Packaging Technology (ICEPT), 2015 16th International Conference on

Conference_Location

Changsha

Type

conf

DOI

10.1109/ICEPT.2015.7236680

Filename

7236680