DocumentCode :
2025897
Title :
Advanced web-based process control for czochralski silicon growth
Author :
Hui Zhang ; Lili Zheng
Author_Institution :
Stony Brook University
fYear :
2002
fDate :
19-19 June 2002
Firstpage :
133
Lastpage :
133
Keywords :
Artificial neural networks; Coils; Cooling; Linear approximation; Neural networks; Power engineering and energy; Predictive models; Process control; Silicon; Temperature control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Control and Automation, 2002. ICCA. Final Program and Book of Abstracts. The 2002 International Conference on
Conference_Location :
Xiamen, Fujian Province, China
Print_ISBN :
0-7803-7412-6
Type :
conf
DOI :
10.1109/ICCA.2002.1229432
Filename :
1229432
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2025897
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