DocumentCode :
2031086
Title :
Micro-optical components for fiber and integrated optics realized by the LIGA technique
Author :
Gerner, M. ; Paatzsch, T. ; Weber, L. ; Schift, H. ; Smaglinski, I. ; Bauer, H.-D. ; Abraham, M. ; Ehrfeld, W.
fYear :
1995
fDate :
29 Jan-2 Feb 1995
Firstpage :
328
Keywords :
Embossing; Integrated optics; Lithography; Microoptics; Optical fibers; Optical polymers; Optical refraction; Optical sensors; Optical waveguides; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 1995, MEMS '95, Proceedings. IEEE
Print_ISBN :
0-7803-2503-6
Type :
conf
DOI :
10.1109/MEMSYS.1995.472600
Filename :
472600
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2031086
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