Title :
Backstepping Control Approach for Closed Loop Feedback Control of Atomic Force Microscope
Author :
Payam, A. Farrokh ; Fathipour, M. ; Jalalifar, M.
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Tehran, Tehran
Abstract :
In this paper a model and a nonlinear control scheme for an atomic force microscope are developed. For this reason a backstepping control algorithm is developed to achieve asymptotic cantilever tip tracking for bounded tip trajectories. In addition, the micro cantilever is modeled by the interaction between sample and cantilever with the Van der waals attraction/repulsion force (i.e., the interaction forces). Simulation results obtained confirm the effectiveness and validity of the proposed controller.
Keywords :
atomic force microscopy; cantilevers; closed loop systems; feedback; nonlinear control systems; physical instrumentation control; van der Waals forces; Van der waals attraction-repulsion force; asymptotic cantilever tip tracking; atomic force microscope; backstepping control; bounded tip trajectories; closed loop feedback control; nonlinear control; Atomic force microscopy; Backstepping; Feedback control; Force control; Force feedback; Probes; Springs; Surface topography; Three-term control; Trajectory;
Conference_Titel :
Multitopic Conference, 2007. INMIC 2007. IEEE International
Conference_Location :
Lahore
Print_ISBN :
978-1-4244-1552-6
Electronic_ISBN :
978-1-4244-1553-3
DOI :
10.1109/INMIC.2007.4557705
