DocumentCode
2034348
Title
High-Q maintenance of microcavity by using a sealed and packaged structure
Author
Shu-Bin Yan ; Ying-Zhan Yan ; Yu-Guang Zhang ; Li Wang ; Chen-Yang Xue ; Jun Liu ; Wen-dong Zhang ; Ji-Jun Xiong
Author_Institution
Key Lab. of Instrum. Sci. & Dynamic Measuremen, North Univ. of China, Taiyuan, China
fYear
2012
fDate
5-8 March 2012
Firstpage
619
Lastpage
622
Abstract
The high-Q maintenance of microcavities greatly challenges the microresonator-based practical application. In this paper, the Q spoiling factors are demonstrated experimentally to show the Q spoiling which originated from the water and the particulate in the surroundings. Then we propose and realize the Q maintenance through constructing a sealed and packaged microcavity regime. In the packaged structure the Q decreases a little but a high Q larger than 106 can be achieved continuously. Moreover, the sealed structure has good performance to maintain the high Q for a long time with the standard deviation about 104, because the Q spoiling factors are isolated by the package layer. Additionally, the package also enhances the robustness. These merits can promote the practical application of the microcavities.
Keywords
Q-factor; electronics packaging; microcavities; micromechanical resonators; statistical analysis; Q spoiling factor; high-Q maintenance; microcavity; microresonator-based practical application; package layer; packaged structure; sealed structure; standard deviation; Couplings; Maintenance engineering; Nanoelectromechanical systems; Robustness; Sensors; High-Q maintenance; Microcavity; Package;
fLanguage
English
Publisher
ieee
Conference_Titel
Nano/Micro Engineered and Molecular Systems (NEMS), 2012 7th IEEE International Conference on
Conference_Location
Kyoto
Print_ISBN
978-1-4673-1122-9
Type
conf
DOI
10.1109/NEMS.2012.6196852
Filename
6196852
Link To Document