DocumentCode
2044075
Title
Magnet arrays for use in a 3-D MEMS mirror array for optical switching
Author
Bernstein, J. ; Taylor, W.P. ; Brazzle, J.D. ; Corcoran, C.J.
Author_Institution
Corning IntelliSense, Wilmington, DE, USA
fYear
2003
fDate
March 30 2003-April 3 2003
Abstract
In this paper, we present magnet array development as part of 3D electromagnetic MEMS mirror arrays for use in optical switching applications. An electromagnetic mirror array uses an external array of magnets positioned under the array of mirrors to provide a strong magnetic field at the mirrors. Each mirror contains multiple coils which interact with the external magnetic fields to produce two orthogonal torques.
Keywords
coils; magnetic fields; magnetic mirrors; micromechanical devices; micromirrors; optical switches; 3D electromagnetic MEMS mirror arrays; MEMS mirror array; magnet arrays; magnetic field; multiple coils; optical switching; orthogonal torques; Coils; Density measurement; Magnetic field measurement; Magnetic fields; Magnetic flux; Magnetic flux density; Magnetic switching; Micromechanical devices; Mirrors; Optical arrays;
fLanguage
English
Publisher
ieee
Conference_Titel
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location
Boston, MA, USA
Print_ISBN
0-7803-7647-1
Type
conf
DOI
10.1109/INTMAG.2003.1230362
Filename
1230362
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