A Bayard-Alpert Ionization Gauge Using Carbon Nanotube Cold Cathode

Author

Huang, J.X. ; Chen, Jun ; Deng, S.Z. ; Xu, N.S.

Author_Institution

State Key Lab. of Optoelectron. Mater. & Technol., Zhongshan Univ., Guangzhou

fYear

2006

fDate

38899

Firstpage

479

Lastpage

480

Abstract

A Bayard-Alpert ionization gauge with a carbon nanotube (CNT) field emitter was fabricated and tested. CNTs were grown on stainless steel rods by thermal chemical vapor deposition at 900degC in a mixture of CH₄ an H₂ gas. The structure of the as-grown CNTs was investigated using scanning electron microscopy, transmission electron microscopy and Raman spectroscopy. The longtime field emission stability, pressure dependence of sensitivity, and the relationship between sensitivity, current transmission ratio of electrons and the voltage of the grid were also investigated

Keywords

CVD coatings; Raman spectra; carbon nanotubes; cathodes; cold-cathode tubes; electric current; electron field emission; ionisation gauges; nanotube devices; scanning electron microscopy; sensitivity; transmission electron microscopy; vacuum microelectronics; 900 degC; Bayard-Alpert ionization gauge; C; CH₄ gas mixture; H₂ gas mixture; Raman spectroscopy; carbon nanotube cold cathode; carbon nanotube field emitter; electron current transmission ratio; grid voltage; longtime field emission stability; nanotube structure; pressure dependence; scanning electron microscopy; sensitivity; stainless steel rods; thermal chemical vapor deposition; transmission electron microscopy; Carbon nanotubes; Cathodes; Chemical vapor deposition; Ionization; Raman scattering; Scanning electron microscopy; Spectroscopy; Steel; Testing; Transmission electron microscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference, 2006 and the 2006 50th International Field Emission Symposium., IVNC/IFES 2006. Technical Digest. 19th International

Conference_Location

Guilin

Print_ISBN

1-4244-0401-0

Type

conf

DOI

10.1109/IVNC.2006.335276

Filename

4134668