Title :
Carbon overlayer for 3-D pole metrology
Author :
Pei Zou ; Nadeau, J.P. ; Arjavac, J.H.
Author_Institution :
FEI Co., Hillsboro, OR, USA
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, W overlayer, in addition to protecting the pole during milling, is to provide the contrast necessary for pole edge recognition. The cross section with W overlayer frequently suffers from the "curtaining" problem, where visible black lines at the W/NiFe interface cause the pole metrology software.
Keywords :
Monte Carlo methods; carbon; ferromagnetic materials; focused ion beam technology; iron alloys; nickel alloys; surface topography; tungsten; 3-D pole metrology; C; W-NiFe; W/NiFe interface; carbon overlayer; milling; pole edge; pole metrology software; visible black lines; Ion beams; Magnetic heads; Manufacturing processes; Metrology; Milling; Pattern recognition; Process control; Protection; Shape; Surface topography;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230585
