Title :
Platinum Black Electroplated Impedance Particle Sensor
Author :
Zheng, Siyang ; Liu, Mike ; Kasdan, Harvey L. ; Tai, Yu-Chong
Author_Institution :
Caltech Micromachining Lab., California Inst. of Technol., Pasadena, CA
Abstract :
The paper presents a micro electrical impedance particle sensor. To solve the problem of large electrode electrolyte interface impedance, we electroplated the electrodes with platinum black. Devices are fabricated with integrated parylene technology. An electrical model for the system is proposed and analytic solutions are obtained. Impedance spectra measurement of the device filled with various media are in excellent agreement with model analysis. Signals from individual 10 mum polystyrene beads passing the sensing electrodes are successfully obtained
Keywords :
electric impedance measurement; electrochemical electrodes; microsensors; platinum; electrolyte interface impedance; electroplated impedance particle sensor; impedance spectra measurement; integrated parylene technology; microelectrical impedance particle sensor; platinum black; polystyrene beads; sensing electrodes; Blood; Capacitance; Counting circuits; Electrodes; Frequency; Image sensors; Immune system; Impedance; Platinum; Sensor systems; electroplating; impedance; particle; paryleen; platinum black;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
DOI :
10.1109/NEMS.2006.334628
