Title :
Study on Large-Inductance Inductors Using Double-Layer Coils on HR Substrate
Author :
Fang, Jie ; Liu, Zewen ; Zhao, Jiahao ; Chen, Zhongmin ; Liu, Litian ; Li, Zhijian
Author_Institution :
Inst. of Microelectron., Tsinghua Univ., Beijing
Abstract :
A large-inductance inductor using double-layer coils on HR (high-resistance) substrate is presented. The design is based on the analytical equation of mutual inductance and the current direction of the coils on different layers. The inductor is realized with a micro-machined process which is compatible with standard CMOS process. To evaluate the performance of double-layer coil inductor, a single-layer inductor with the same structural and process parameters is also designed and fabricated. Measurement results give inductance of 7.7nH at 1GHz for double-layer inductor and 2.2nH at 1GHz for single-layer one. The measured Q (quality factor) of 9.6 at 0.8GHz and self-resonance frequency of 2.2GHz indicates that it is applicable for VHF/UHF applications
Keywords :
Q-factor; UHF devices; VHF devices; inductance; inductors; micromechanical devices; 0.8 GHz; 1 GHz; 2.2 GHz; UHF application; VHF application; double-layer coil inductor; double-layer coils; high resistance substrate; large inductance inductors; mutual inductance; quality factor; self-resonance frequency; single-layer inductor; standard CMOS process; Coils; Differential equations; Frequency measurement; Inductance; Inductors; Micromechanical devices; Parasitic capacitance; Q factor; Q measurement; UHF measurements; Double-Layer Structure; HR Substrate; Large-Inductance Inductor; RF MEMS;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
DOI :
10.1109/NEMS.2006.334692
