Title :
A silicon microactuator using integrated microfabrication technology
Author :
Lu, Y. ; Yang, J.P. ; Chen, J. ; Chen, S.X.
Author_Institution :
Data Storage Inst., Singapore, Singapore
fDate :
March 30 2003-April 3 2003
Abstract :
In this paper, a silicon electrostatic microactuator is developed using the proposed MEMS technologies with integrated head element fabrication processing in disk drive industry.
Keywords :
elemental semiconductors; magnetic heads; microactuators; silicon; MEMS method; Si; integrated head element fabrication; integrated microfabrication; silicon microactuator; Magnetics; Microactuators; Silicon;
Conference_Titel :
Magnetics Conference, 2003. INTERMAG 2003. IEEE International
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7647-1
DOI :
10.1109/INTMAG.2003.1230940
