• DocumentCode
    2060079
  • Title

    Impurity-free vacancy disordering of quantum wells and quantum dots for optoelectronic/photonic integrated circuits

  • Author

    Fu, L. ; Lever, P. ; Gareso, P.L. ; Buda, M. ; Tan, H.H. ; Jagadish, C. ; Reece, P. ; Gal, M.

  • Author_Institution
    Dept. of Electron. Mat. Eng., Australian Nat. Univ., Canberra, ACT, Australia
  • fYear
    2004
  • fDate
    20-25 Sept. 2004
  • Firstpage
    107
  • Lastpage
    112
  • Abstract
    Impurity free vacancy disordering (JFVD) is one of the most promising interdiffusion techniques for device application which has been studied extensively in recent years. In this work, we review the method of applying different dielectric capping layers for promoting or suppressing IFVD in both quantum well and quantum dot structures. The mechanism of interdiffusion process based on group HI vacancy generation and diffusion was introduced and discussed to explain the different effects created by the capping layers. It is demonstrated that using this method, different band gap energies across the same wafer can be achieved, which is essential for optoelectronic/photonic integrated circuits.
  • Keywords
    chemical interdiffusion; energy gap; integrated optoelectronics; reviews; semiconductor quantum dots; semiconductor quantum wells; vacancies (crystal); band gap energies; dielectric capping layers; impurity-free vacancy disordering; interdiffusion; optoelectronic integrated circuits; photonic integrated circuits; quantum dots; quantum wells; review; Atomic layer deposition; Dielectrics; Gallium arsenide; Impurities; Indium gallium arsenide; Photonic band gap; Photonic integrated circuits; Quantum dots; Substrates; US Department of Transportation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semiconducting and Insulating Materials, 2004. SIMC-XIII-2004. 13th International Conference on
  • Print_ISBN
    0-7803-8668-X
  • Type

    conf

  • DOI
    10.1109/SIM.2005.1511397
  • Filename
    1511397