Title :
Various characteristic of Carbon nanotubes film methane Gas sensor
Author :
Li, Xin ; Liu, Junhua ; Zhu, Changchun
Author_Institution :
Sch. of Electron. & Inf. Eng., Xi´´an Jiaotong Univ.
Abstract :
Various sensing characteristic of carbon nanotube synthesized by low press chemical vapor deposit (LPCVD) method have been studied. The composite sensing film of silicon dioxide and multi-wall nanotubes (SiO 2-MWNTs) is sensitive to methane. The various characteristic such as sensitivity, repeatability, reliability and cross-sensitivity of SiO2-MWNTs composite film gas sensor have been studied. Having been tested in methane 3 times, the sensor keeps the sensitivity steady, which means the sensor has a good repeatability. In concentration recognizing, the temperature is an interfering factor and always leads to error result. It is eliminated using neural network (NN) recognized system
Keywords :
carbon nanotubes; chemical vapour deposition; composite materials; gas sensors; nanotube devices; neural nets; organic compounds; silicon compounds; LPCVD method; SiO2-C; carbon nanotubes film; composite sensing film; concentration recognition; low press chemical vapor deposit; methane gas sensor; neural network recognized system; sensor cross-sensitivity; sensor reliability; sensor repeatability; silicon dioxide-multiwall nanotube composite; Carbon nanotubes; Electrodes; Gas detectors; Glass; Neural networks; Sensor phenomena and characterization; Shape; Substrates; Temperature sensors; Testing; carbon nanotube; gas sensor; methane; neural network;
Conference_Titel :
Nano/Micro Engineered and Molecular Systems, 2006. NEMS '06. 1st IEEE International Conference on
Conference_Location :
Zhuhai
Print_ISBN :
1-4244-0139-9
Electronic_ISBN :
1-4244-0140-2
DOI :
10.1109/NEMS.2006.334805
