Towards batch fabrication of bundled carbon nanotube thermal sensors

A new approach for batch fabrication of carbon nanotubes (CNT) based MEMS thermal sensor was developed using AC electrophoretic manipulation of MWNT bundles on a silicon substrate. Based on this technique, CNT were successfully and repeatably manipulated by AC electrophoresis to form resistive elements between Au microelectrodes. We have preliminarily proved the feasibility to batch assembly of CNT devices with greater than 70% success rate. Besides, the devices were demonstrated to potentially serve as novel thermal sensors. We have measured the temperature coefficient of resistance (TCR) of these MWNT-based micro sensors and also integrated them into constant current configuration for dynamic characterization. The I-V measurements of the resulting devices revealed that their power consumption were in the μW range. Based on these experimental evidences and our proposed new approach, a feasible batch manufacturable scheme for functional CNT based thermal sensors is suggested which will dramatically reduce production costs of nano sensing devices and potentially enable fully automated assembly of CNT-based devices.