Device for measurement of microobject linear dimension

Author

Kostruba, A.M. ; Viokh, O.G.

Author_Institution

Lab. of Polarimetry, Inst. for Phys. Opt., Lviv, Ukraine

Volume

1

fYear

1996

fDate

1996

Firstpage

277

Abstract

Device is intended for the experimental obtaining of intensity distribution in the section of beam diffracted from pre-grooved surface. It simulates the work of laser read-out systems as at the reproduction as in the static state. It is possible to estimate the influence of optical system parameters on the values of reproduction-, servo-signals and signal/noise ratios. This device may be used for the measuring of relief microobject dimensions as well as for the optimization of optical channel and optical disc parameters and for the design of optical discs with the higher information density

Keywords

CCD image sensors; light diffraction; measurement by laser beam; optical disc storage; optical testing; production testing; spatial variables measurement; surface topography measurement; CCD camera; DRAW optical disc; disc surface; information density; intensity distribution; laser read-out systems; manufacture; microobject linear dimension; optical channel; optical disc parameters; optical system parameters; optimization; pre-grooved surface; relief microobject dimensions; reproduction; servo-signals; signal/noise ratios; testing; Disk recording; Laser beams; Microstructure; Optical design; Optical devices; Optical diffraction; Optical noise; Optical recording; Optical refraction; Optical variables control;

fLanguage

English

Publisher

ieee

Conference_Titel

Instrumentation and Measurement Technology Conference, 1996. IMTC-96. Conference Proceedings. Quality Measurements: The Indispensable Bridge between Theory and Reality., IEEE

Conference_Location

Brussels

Print_ISBN

0-7803-3312-8

Type

conf

DOI

10.1109/IMTC.1996.507392

Filename

507392