Computational challenges in simulations of ULSI semiconductor devices

Semiconductor process, device, and circuit simulation plays a significant role in the development of integrated circuit technology, providing quick prototyping and quantities not easily measured. Predictive models allow optimization of chip designs and are an essential component of the technology design process. As semiconductor devices shrink into the deep-submicron regime, device simulation faces new challenges, necessitating improvements in both physical understanding and numerical capabilities. The authors first review the state-of-the-art of semiconductor simulation and then outline some of the challenges.<>