A Microwave System for High Accuracy High Spatial Resolution Dielectric Constant Uniformity Measurement

This paper presents a microwave system using an aperture in a microstrip resonant probe capable of measuring dielectric constant uniformity with high accuracy and high degree of spatial resolution. The volume scanned by the probe aperture is estimated to be 0.0301" × 0.0101" in area and 0.010" in depth and the accuracy achieved in dielectric constant uniformity measurement at 10 Ghz is better than 0.5% by using the resonant probe as part of a frequency discriminator in the measuring system.