Scheduling and control for time-constrained processes in semiconductor manufacturing

This paper discusses a scheduling problem with delay time constraint arising in the semiconductor manufacturing. The delay time constraint means that a process should be started within delay time from the start step of the process. It becomes more critical to determine the fab yield and product quality. This paper examines scheduling and control problem for semiconductor manufacturing which has time constrained processes. We classify the problem into 3 levels and propose the solution algorithm for each problem. We also explain how to integrate our MES system for the problem