Micromachined acoustic sensors with integrated optoelectronic readout

Author

Degettekin, F.L. ; Hall, Neal A. ; Lee, W.

Author_Institution

G.W. Woodruff Sch. of Mech. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2003

fDate

18-21 Aug. 2003

Firstpage

16

Lastpage

17

Abstract

A diffraction-based optical displacement detection method that enables integration of optoelectronics with micromachined acoustic structures in a small volume is described. Coupled with electrostatic actuation, the method is used to implement broadband (DC-200 kHz) micromachined microphones and microphone arrays with self-calibration capabilities as well as ultrasonic transmit-receive arrays operating in air into the MHz frequency range.

Keywords

calibration; diffraction gratings; electrostatic actuators; integrated optoelectronics; micromachining; microphones; microsensors; optical signal detection; ultrasonic transducer arrays; 200 kHz; MHz frequency range; broadband micromachined microphones; diffraction-based optical displacement detection; electrostatic actuation; integrated optoelectronic readout; micromachined acoustic sensors; microphone arrays; self-calibration capabilities; ultrasonic transmit-receive arrays; Acoustic diffraction; Acoustic sensors; Acoustic signal detection; Electrostatic actuators; Integrated optics; Integrated optoelectronics; Microphone arrays; Optical detectors; Optical diffraction; Optical sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Optical MEMS, 2003 IEEE/LEOS International Conference on

Print_ISBN

0-7803-7830-X

Type

conf

DOI

10.1109/OMEMS.2003.1233445

Filename

1233445