• DocumentCode
    2093620
  • Title

    Selective oxidation and successive wet etching for freestanding structure of magneto-optic waveguide

  • Author

    Yokoi, Hideki ; Shoji, Yuya ; Mizumoto, Tetsuya

  • Author_Institution
    Dept. of Electr. & Electron. Eng., Tokyo Inst. of Technol., Japan
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    75
  • Lastpage
    76
  • Abstract
    A magneto-optic waveguide with a semiconductor guiding layer was studied for an optical isolator employing a nonreciprocal phase shift. Freestanding structure of the waveguide was obtained by selective oxidation and successive wet etching.
  • Keywords
    etching; integrated optics; magneto-optical devices; optical communication equipment; optical fabrication; optical isolators; optical waveguides; oxidation; semiconductor materials; magneto-optic waveguide; nonreciprocal phase shift; optical isolator; selective oxidation; semiconductor guiding layer; wet etching; Electromagnetic waveguides; Isolators; Magnetooptic effects; Optical interferometry; Optical refraction; Optical surface waves; Optical variables control; Optical waveguides; Oxidation; Wet etching;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233474
  • Filename
    1233474
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2093620