Title :
Nonlinear torque compensation of comb-driven micromirror
Author :
Sakai, Y. ; Yamabana, T. ; Ide, S. ; Mori, K. ; Ishizuka, A. ; Tsuboi, O. ; Matsuyama, Takashi ; Ishii, Y. ; Kawai, M.
Author_Institution :
Fujitsu Labs. Ltd., Atsugi, Japan
Abstract :
We achieved high-speed (i.e., less than 1 ms) angle response without resonance by applying the nonlinear torque compensation of a comb-driven micromirror to a feed-forward controller.
Keywords :
compensation; micromirrors; torque control; comb-driven micromirror; feed-forward controller; nonlinear torque compensation; Capacitance; Circuit simulation; Feedback control; Micromirrors; Mirrors; Nonlinear distortion; Optical switches; Resonance; Torque control; Voltage;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233478
