DocumentCode
2093789
Title
Vertical comb drive actuator constructed by buckled bridges in SOI-MEMS
Author
Sasaki, M. ; Briand, D. ; Noel, W. ; de Rooij, N.
Author_Institution
Dept. of Machine Intelligence & Syst. Eng., Tohoku Univ., Sendai, Japan
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
89
Lastpage
90
Abstract
Vertical comb drive actuators are now frequently used for rotating micromirrors. For constructing the vertical comb, paired combs positioned at different heights are necessary. In many cases, Si dry etching is carried out from front and bottom surfaces of SOI wafer. The alignment accuracy between combs depends on the aligner accuracy. The backside Si etching becomes very deep with the increase of technical difficulty. In this study, a new method for realizing the vertical comb in SOI-MEMS and its performance is examined.
Keywords
elemental semiconductors; etching; microactuators; micromirrors; optical fabrication; optical testing; silicon; silicon-on-insulator; SOI wafer; SOI-MEMS; Si; Si etching; alignment accuracy; buckled bridges; rotating micromirrors; vertical comb drive actuators; Actuators; Bridge circuits; Estimation theory; Etching; Low voltage; Machine intelligence; Micromirrors; Mirrors; Semiconductor films; Thermal stresses;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233481
Filename
1233481
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