DocumentCode
2094080
Title
Microelectromechanical VOA design for high shock-tolerance and low temperature-dependence
Author
Isamoto, Keiji ; Kato, Kazuya ; Morosawa, Atsushi ; Chong, Changho ; Fujita, Hiroyuki ; Toshiyoshi, Hiroshi
Author_Institution
Santec Corp., Aichi, Japan
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
113
Lastpage
114
Abstract
We report a novel tilt mirror mechanism for microelectromechanical variable optical attenuators of fast response (1 kHz) and low voltage operation (5 V) along with an improved design for low temperature dependence and high shock tolerance.
Keywords
electrostatic actuators; micromirrors; optical attenuators; optical design techniques; thermal stability; vibrations; 1 kHz; 5 V; microelectromechanical VOA design; shock-tolerance; tilt mirror mechanism; variable optical attenuators; Electrostatic actuators; Low voltage; Micromechanical devices; Mirrors; Optical attenuators; Optical design; Optical fibers; Packaging; Silicon; Temperature dependence;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233492
Filename
1233492
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