Title :
A low-voltage three-axis electromagnetically actuated micromirror for high coupling efficiency
Author :
Cho, Il-Joo ; Yoon, Euisik
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
Abstract :
A new three-axis electromagnetically-actuated micromirror using an SOI wafer is proposed and fabricated. This micromirror can be used for optical switches, optical scanners and alignment modules with low voltage operation and high coupling efficiency due to three degrees of freedom.
Keywords :
electromagnetic actuators; micromirrors; optical couplers; optical design techniques; optical fabrication; silicon-on-insulator; SOI wafer; Si; alignment modules; coupling efficiency; electromagnetic actuation; low voltage operation; micromirror; optical scanners; optical switches; three degrees of freedom; Actuators; Coils; Electromagnetic coupling; Gold; Light sources; Magnetic field measurement; Micromirrors; Mirrors; Optical devices; Silicon;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233497
