DocumentCode
2094451
Title
GaAs-based microelectromechanical waveguide switches monolithically integrated with lasers and detectors
Author
Cich, Michael J. ; Lopez, Gerry M. ; Tigges, Chris ; Spahn, Olga Blum
Author_Institution
Sandia Nat. Labs., Albuquerque, NM, USA
fYear
2003
fDate
18-21 Aug. 2003
Firstpage
137
Lastpage
138
Abstract
In this paper, the monolithic integration of edge-emitting lasers and detectors with MEMS waveguide switches is demonstrated. Fabrication issues, such as choice of materials and critical design dimensions are discussed. Details of device performance are also given.
Keywords
III-V semiconductors; gallium arsenide; integrated optics; micro-optics; microsensors; microswitches; optical design techniques; optical fabrication; optical sensors; optical switches; optical waveguide components; quantum well lasers; semiconductor device testing; semiconductor quantum wells; GaAs; MEMS; design dimensions; detectors; device performance; edge-emitting lasers; monolithic integration; optical fabrication; waveguide switches; Etching; Gallium arsenide; Integrated optics; Laboratories; Micromechanical devices; Optical switches; Optical waveguides; Planar waveguides; Semiconductor waveguides; Waveguide lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN
0-7803-7830-X
Type
conf
DOI
10.1109/OMEMS.2003.1233504
Filename
1233504
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