• DocumentCode
    2094615
  • Title

    Bi-directional movable latching structure using electrothermal V-beam actuators for optical switch application

  • Author

    Chen, Wen-Chih ; Wu, Chia-Yu ; Lee, Chengkuo

  • Author_Institution
    Asia Pacific Microsystems Inc., Hsinchu, Taiwan
  • fYear
    2003
  • fDate
    18-21 Aug. 2003
  • Firstpage
    149
  • Lastpage
    150
  • Abstract
    We present a new bistable MEMS structure driven by a pair of electrothermal V-beam actuators with capability of bi-directional motion. The preliminary results enable its application possibility for optical switch.
  • Keywords
    micro-optics; microactuators; microswitches; optical bistability; optical design techniques; optical fabrication; optical switches; optical testing; MEMS; bidirectional latching structure; electrothermal V-beam actuators; movable latching structure; optical switch application; Actuators; Bidirectional control; Electrothermal effects; Micromechanical devices; Optical bistability; Optical design; Optical switches; Particle beam optics; Relays; Springs;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Optical MEMS, 2003 IEEE/LEOS International Conference on
  • Print_ISBN
    0-7803-7830-X
  • Type

    conf

  • DOI
    10.1109/OMEMS.2003.1233510
  • Filename
    1233510
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=2094615