Title :
Improved single crystalline mirror actuated electrostatically by terraced electrodes with high-aspect ratio torsion spring
Author :
Sawada, Renshi ; Yamaguchi, Johji ; Higurashi, Eiji ; Shimizu, Akira ; Yamamoto, Tsuyoshi ; Takeuchi, Nobuyuki ; Uenishi, Yuji
Author_Institution :
NTT Microsystem Integration Labs., NTT Corp., Kanagawa, Japan
Abstract :
This paper describes improvements made to a single-crystal mirror actuated electrostatically by terraced electrodes with a high-aspect ratio torsion spring. The improvements are reduced mirror pitch, increased mirror size, and higher stability from the electrical viewpoint.
Keywords :
electrodes; electrostatic actuators; micromirrors; optical design techniques; optical testing; torsion; electrostatic actuation; mirror pitch; mirror size; single crystalline mirror; stability; terraced electrodes; torsion spring; Collimators; Crystallization; Electrodes; Fluctuations; Micromechanical devices; Mirrors; Optical arrays; Optical switches; Springs; Stability;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233512
