Title :
Optical properties of microlenses fabricated using hydrophobic effects and polymer-jet-printing technology
Author :
Choo, Hyuck ; Muller, Richard S.
Author_Institution :
Berkeley Sensor & Actuator Center, California Univ., Berkeley, CA, USA
Abstract :
High-precision microlenses with excellent optical characteristics is described. The lenses are formed precisely at desired locations on a wafer using a polymer-jet system in which hydrophobic effects define the lens diameter and surface tension creates a high-quality optical surface. This hybrid method enables researchers to define the locations and diameters of microlenses with ±1 μm precision as well as to control the curvatures of the microlenses accurately.
Keywords :
microlenses; optical fabrication; optical polymers; optical testing; hydrophobic effects; lens curvature; microlenses; optical properties; optical surface; polymer-jet-printing technology; surface tension; Adaptive optics; Lenses; Microoptics; Optical arrays; Optical polymers; Optical sensors; Optical surface waves; Printing; Rough surfaces; Surface tension;
Conference_Titel :
Optical MEMS, 2003 IEEE/LEOS International Conference on
Print_ISBN :
0-7803-7830-X
DOI :
10.1109/OMEMS.2003.1233519
