DocumentCode
2095294
Title
Design and fabrication of low-refractive-index polymeric photonic crystal nanobeam structures
Author
Zi-Ming Meng ; Yi-Hua Hu ; Zhi-Yuan Li
Author_Institution
Sch. of Phys. & Optoelectron. Eng., Guangdong Univ. of Technol., Guangzhou, China
fYear
2012
fDate
7-10 Nov. 2012
Firstpage
1
Lastpage
3
Abstract
The design of high-Q polymeric photonic crystal nanobeam microcavities is studied based on the three-dimensional finite-difference time-domain method. Experimentally the fabrication method of air-bridged polymeric photonic crystal nanobeam structures is presented using focused ion beam etching and wet chemical etching.
Keywords
finite difference time-domain analysis; focused ion beam technology; microcavities; nanophotonics; optical design techniques; optical fabrication; optical polymers; photonic crystals; refractive index; sputter etching; air-bridged polymeric photonic crystal nanobeam structures; focused ion beam etching; high-Q polymeric photonic crystal nanobeam microcavities; low-refractive-index polymeric photonic crystal nanobeam structures; three-dimensional finite-difference time-domain method; wet chemical etching;
fLanguage
English
Publisher
ieee
Conference_Titel
Communications and Photonics Conference (ACP), 2012 Asia
Conference_Location
Guangzhou
ISSN
2162-108X
Print_ISBN
978-1-4673-6274-0
Type
conf
Filename
6510855
Link To Document