Title :
A multistage smoothing algorithm for coupling cellular and polygonal datastructures
Author :
Hössinger, Andreas ; Cervenka, J. ; Selberherr, Siegfried
Author_Institution :
Inst. fur Microelectron., Technische Univ. Wien, Austria
Abstract :
When cellular based topography simulation is coupled with polygonal data structures it is necessary to extract a triangular representation of the surface of the simulated structure after a deposition or an etching process from the cellular discretization. In this work an advanced multistage cellular postprocessing algorithm is presented which is capable of generating a smooth triangulated surface with a relatively small number of triangles even for practical applications in semiconductor process simulation. All structural edges are maintained by the smoothing algorithm while almost all artificial edges are removed from the surface discretization.
Keywords :
data structures; etching; semiconductor process modelling; smoothing methods; artificial edges; cellular based topography simulation; cellular discretization; coupled cellular polygonal datastructures; etching process; multistage cellular postprocessing algorithm; multistage smoothing algorithm; polygonal data structures; polygonal datastructures; semiconductor process simulation; simulated structure; smooth triangulated surface; smoothing algorithm; surface discretization; triangular representation; Data mining; Data structures; Etching; Laboratories; Microelectronics; Robustness; Semiconductor process modeling; Smoothing methods; Surface topography; Telephony;
Conference_Titel :
Simulation of Semiconductor Processes and Devices, 2003. SISPAD 2003. International Conference on
Conference_Location :
Boston, MA, USA
Print_ISBN :
0-7803-7826-1
DOI :
10.1109/SISPAD.2003.1233686
