Title :
On-chip Integration of Microfluidic Channels with Ultra-high Q Silicon Microdisk Resonators for Lab-on-a-Chip Sensing Applications
Author :
Yegnanarayanan, Siva ; Roman, Will ; Soltani, Mohammad ; Cremona, Gina ; Lu, Hang ; Adibi, Ali
Author_Institution :
Georgia Inst. of Technol., Atlanta
Abstract :
This study demonstrates the design, fabrication, and characterization of a sensing platform based on the on-chip integration of such silicon-based microdisk resonators (with ultra high Q > 106) with microfluidic channels for sample delivery. Tuning of the resonance features using fluid in upper-cladding as well as applications in lab-on-a-chip sensing are reported.
Keywords :
Q-factor; elemental semiconductors; integrated optics; lab-on-a-chip; microfluidics; optical resonators; silicon; Si; lab-on-a-chip sensing; microdisk resonators; microfluidic channels; on-chip integration; resonance tuning; silicon resonators; ultrahigh Q resonators; Lab-on-a-chip; Microfluidics; Monolithic integrated circuits; Optical resonators; Optical waveguides; Photonics; Refractive index; Resonance; Scanning electron microscopy; Silicon on insulator technology;
Conference_Titel :
Lasers and Electro-Optics Society, 2007. LEOS 2007. The 20th Annual Meeting of the IEEE
Conference_Location :
Lake Buena Vista, FL
Print_ISBN :
978-1-4244-0925-9
Electronic_ISBN :
1092-8081
DOI :
10.1109/LEOS.2007.4382269
