DocumentCode :
2100242
Title :
Development of a calculable capacitor
Author :
Wang, Yicheng ; Lee, Rae Duk ; Koffman, Andrew ; Durand, Mathieu ; Lawall, John ; Pratt, Jon
Author_Institution :
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
fYear :
2011
fDate :
10-12 May 2011
Firstpage :
1
Lastpage :
3
Abstract :
This paper summarizes the current NIST effort to manufacture a new calculable capacitor, focusing on issues associated with the fabrication of the main electrodes and their alignment as well as development of a high resolution Fabry-Perot interferometer system for displacement measurements of the calculable capacitor. Results presented here for diamond turned aluminum electrodes show useable profiles that deviate from straight by less than 25 nm. We have also achieved a fractional uncertainty of ~1.25×10-9 for displacement measurements without any optical frequency standard.
Keywords :
Fabry-Perot interferometers; capacitance measurement; capacitors; displacement measurement; electrodes; measurement standards; Fabry-Perot interferometer; NIST; calculable capacitor; diamond turned aluminum electrodes; displacement measurements; fabrication; optical frequency standard; Cavity resonators; Coordinate measuring machines; Electrodes; Fiber lasers; Measurement by laser beam; Optical interferometry; Optical variables measurement; calculable capacior; interferometers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Instrumentation and Measurement Technology Conference (I2MTC), 2011 IEEE
Conference_Location :
Binjiang
ISSN :
1091-5281
Print_ISBN :
978-1-4244-7933-7
Type :
conf
DOI :
10.1109/IMTC.2011.5944257
Filename :
5944257
Link To Document :
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