DocumentCode :
2101369
Title :
Dual SAW oscillator for low SO2 concentrations measurement
Author :
Bodea, Emil ; Blaga, Iuliu ; Apostolescu, Radu ; Schiopu, Paul
Author_Institution :
R&D Inst. for Electr. Eng., Bucharest, Romania
Volume :
1
fYear :
1996
fDate :
9-12 Oct 1996
Firstpage :
121
Abstract :
A device for surface acoustic wave (SAW) measurements, based on an organic sensitive film, that is triethanolamine (TEA), has been realized. A dual SAW oscillator was used to measure the frequency shift due to gas adsorption in the TEA film. A linear response was obtained in the range 0-100 ppm SO2 and the sensibility was about 80 Hz/ppm
Keywords :
chemical variables measurement; gas sensors; sulphur compounds; surface acoustic wave oscillators; surface acoustic wave sensors; SAW measurement; SO2; TEA film; dual SAW oscillator; frequency shift; gas adsorption; linear response; low SO2 concentrations measurement; organic sensitive film; surface acoustic wave measurements; triethanolamine; Electrodes; Fingers; Oscillators; Resists; Surface acoustic waves;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Semiconductor Conference, 1996., International
Conference_Location :
Sinaia
Print_ISBN :
0-7803-3223-7
Type :
conf
DOI :
10.1109/SMICND.1996.557320
Filename :
557320
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=2101369
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