DocumentCode :
2101646
Title :
SAW tomography-spatially resolved charge detection by SAW in semiconductor structures for imaging applications
Author :
Streibl, M. ; Beil, F. ; Wixforth, Achim ; Kadow, C. ; Gossard, Arthur C.
Author_Institution :
CeNS & Sektion Phys., Ludwig Maximilians Univ., Munich, Germany
Volume :
1
fYear :
1999
fDate :
17-20 Oct. 1999
Firstpage :
11
Abstract :
The interaction of surface acoustic waves and free carriers in a nearby semiconducting sheet yields an extremely sensitive method for sensing electrical and optical signals. In the present work we demonstrate the spatially resolved detection of optical signals with a spatial resolution of a few acoustic wavelengths. We exploit the high selectivity of so-called tapered transducers to excite adjustable narrow acoustic beams allowing for the scanning of photogenerated charge distributions. Using a special layout, both x and y-coordinate of the optical signal are readily read out in a single frequency sweep. Complex 2D image information can be gathered when a tomographic imaging technique is applied.
Keywords :
acoustic tomography; charge measurement; semiconductors; surface acoustic wave transducers; 2D imaging; SAW tomography; acoustic beam scanning; optical signal; semiconductor structure; spatially resolved charge detection; tapered transducer; Acoustic signal detection; Acoustic waves; Optical detectors; Optical sensors; Optical surface waves; Semiconductivity; Signal resolution; Spatial resolution; Surface acoustic waves; Ultraviolet sources;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
Conference_Location :
Caesars Tahoe, NV
ISSN :
1051-0117
Print_ISBN :
0-7803-5722-1
Type :
conf
DOI :
10.1109/ULTSYM.1999.849346
Filename :
849346
Link To Document :
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