• DocumentCode
    2102255
  • Title

    Analysis of pseudo-surface acoustic waves (PSAW) in quartz periodic structures with electrode fingers

  • Author

    Yook-Kong Yong ; Kanna, Sithan

  • Author_Institution
    Dept. of Civil & Environ. Eng., Rutgers Univ., Piscataway, NJ, USA
  • Volume
    1
  • fYear
    1999
  • fDate
    17-20 Oct. 1999
  • Firstpage
    147
  • Abstract
    A finite element study of the piezoelectric Lagrangian equations for frequency-temperature behavior was performed for a two-dimensional periodic PSAW structure of quartz. Plane strain assumptions were used to enable a two-dimensional analysis of straight crested pseudo surface acoustic waves in the structure. Two PSAW modes can exist on a partially metallized substrate surface; one has an anti symmetric electric potential field about the electrode center and the other has a symmetric field. The anti symmetric mode has a higher phase velocity and is less affected by the electrode mass. These two modes degenerate into one mode on a fully metallized surface or a free surface. The attenuation of the PSAW mode is strongly affected by both the electrode height and crystal cut angles. Strong PSAW modes with good frequency-temperature behavior can be obtained by a proper combination of electrode material, electrode height and the substrate cut angle.
  • Keywords
    electrodes; finite element analysis; periodic structures; piezoelectric materials; quartz; surface acoustic waves; SiO2; electrode finger; finite element method; piezoelectric Lagrangian equation; pseudo-surface acoustic wave; quartz periodic structure; two-dimensional analysis; Acoustic waves; Capacitive sensors; Electrodes; Equations; Finite element methods; Frequency; Lagrangian functions; Metallization; Periodic structures; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ultrasonics Symposium, 1999. Proceedings. 1999 IEEE
  • Conference_Location
    Caesars Tahoe, NV
  • ISSN
    1051-0117
  • Print_ISBN
    0-7803-5722-1
  • Type

    conf

  • DOI
    10.1109/ULTSYM.1999.849373
  • Filename
    849373