Integration of actuable MEMS in networked sensing systems

In MEMS based systems, sensors and actuators play a key role. Since actuators are often based on micromirrors, we have chosen a specific micromirror MEMS system for daylight guiding as an example for this integration. The requirements of a networked sensing system designed to cope with such electrostatic actuable micromirror array modules will be developed. The networked sensing system is required to monitor the interior as well as the exterior conditions of a room as precisely as possible. Information about climate and the illumination situation of the room as well as outside conditions (e.g. sky coverage) will be gathered to optimize the energy efficiency of the room itself by driving the implemented micromachined mirror modules adequately. Sensoric interaction with persons inside the room is necessary to adapt the ambience especially to the requirements of these persons. Networked sensor and actuator systems enable to implement energy saving combined with an optimum illumination situation customized to the utilization of the ambience.